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- 82016883 contributor B4186150.
- 82016883 contributor B4186151.
- 82016883 contributor B4186152.
- 82016883 created "1982.".
- 82016883 date "1982".
- 82016883 date "1982.".
- 82016883 dateCopyrighted "1982.".
- 82016883 description "Includes bibliographies and index.".
- 82016883 extent "xii, 372 p. :".
- 82016883 identifier "0387118780 (U.S.)".
- 82016883 isPartOf "Springer series in electrophysics ; v. 10".
- 82016883 issued "1982".
- 82016883 issued "1982.".
- 82016883 language "eng".
- 82016883 publisher "Berlin ; New York : Springer-Verlag,".
- 82016883 subject "621.3815/2 19".
- 82016883 subject "Ion implantation.".
- 82016883 subject "Semiconductor doping.".
- 82016883 subject "TK7871.85 .I587 1982".
- 82016883 title "Ion implantation techniques : lectures given at the Ion Implantation School, in connection with the Fourth International Conference on Ion Implantation: Equipment and Techniques, Berchtesgaden, Fed. Rep. of Germany, September 13-15, 1982 / editors, H. Ryssel and H. Glawischnig.".
- 82016883 type "text".