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- 82060282%2F%2Fr852 contributor B4202064.
- 82060282%2F%2Fr852 contributor B4202065.
- 82060282%2F%2Fr852 created "c1982.".
- 82060282%2F%2Fr852 date "1982".
- 82060282%2F%2Fr852 date "c1982.".
- 82060282%2F%2Fr852 dateCopyrighted "c1982.".
- 82060282%2F%2Fr852 description "Includes bibliographical references and indexes.".
- 82060282%2F%2Fr852 extent "viii, 265 p. :".
- 82060282%2F%2Fr852 identifier "0892523697 (pbk.)".
- 82060282%2F%2Fr852 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 334".
- 82060282%2F%2Fr852 issued "1982".
- 82060282%2F%2Fr852 issued "c1982.".
- 82060282%2F%2Fr852 language "eng".
- 82060282%2F%2Fr852 publisher "Bellingham, Wash. : SPIE--the International Society for Optical Engineering,".
- 82060282%2F%2Fr852 subject "621.381/74 19".
- 82060282%2F%2Fr852 subject "Integrated circuits Very large scale integration Congresses.".
- 82060282%2F%2Fr852 subject "Microlithography Congresses.".
- 82060282%2F%2Fr852 subject "TR940 .O67 1982".
- 82060282%2F%2Fr852 title "Optical microlithography : technology for the mid-1980s, March 31-April 1, 1982, Santa Clara, California / Harry L. Stover, chairman/editor.".
- 82060282%2F%2Fr852 type "text".