Matches in Library of Congress for { <http://lccn.loc.gov/82073342> ?p ?o. }
Showing items 1 to 20 of
20
with 100 items per page.
- 82073342 alternative "Reactive ion etching.".
- 82073342 contributor B4207477.
- 82073342 created "c1982.".
- 82073342 date "1982".
- 82073342 date "c1982.".
- 82073342 dateCopyrighted "c1982.".
- 82073342 description "Includes bibliographical references.".
- 82073342 extent "87 p. :".
- 82073342 identifier "0883184060 (pbk.)".
- 82073342 isPartOf "American Vacuum Society monograph series".
- 82073342 issued "1982".
- 82073342 issued "c1982.".
- 82073342 language "eng".
- 82073342 publisher "New York, N.Y. : American Institute of Physics,".
- 82073342 subject "621.381/7 19".
- 82073342 subject "Plasma etching.".
- 82073342 subject "Semiconductors Etching.".
- 82073342 subject "TK7871.85 .C577 1982".
- 82073342 title "Plasma etching and reactive ion etching / J.W. Coburn.".
- 82073342 type "text".