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- 82105401 contributor B4219074.
- 82105401 contributor B4219075.
- 82105401 created "1981.".
- 82105401 date "1981".
- 82105401 date "1981.".
- 82105401 dateCopyrighted "1981.".
- 82105401 description "Bibliography: p. [142]-143.".
- 82105401 extent "144 p. :".
- 82105401 issued "1981".
- 82105401 issued "1981.".
- 82105401 language "rus".
- 82105401 subject "Masks (Electronics)".
- 82105401 subject "Microelectronics.".
- 82105401 subject "Photolithography.".
- 82105401 subject "TK7874 .G575 1981".
- 82105401 title "Generatory izobrazheniĭ v proizvodstve integralʹnykh mikroskhem / I.M. Glazkov, I︠A︡.A. Raĭkhman ; Red. Ė.I. Tochit︠s︡kiĭ.".
- 82105401 type "text".