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- 82601772 contributor B4365144.
- 82601772 created "1982.".
- 82601772 date "1982".
- 82601772 date "1982.".
- 82601772 dateCopyrighted "1982.".
- 82601772 extent "55 p. ;".
- 82601772 isPartOf "NBS list of publications ; 72".
- 82601772 issued "1982".
- 82601772 issued "1982.".
- 82601772 language "eng".
- 82601772 publisher "Washington, D.C. : U.S. Dept. of Commerce, National Bureau of Standards,".
- 82601772 subject "016.6213815/2/0287 19".
- 82601772 subject "Semiconductors Measurement.".
- 82601772 subject "Semiconductors Testing.".
- 82601772 subject "TK7871.85 .S4649 1982".
- 82601772 title "Semiconductor measurement technology.".
- 82601772 type "text".