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- 83006689 contributor B4395118.
- 83006689 contributor B4395119.
- 83006689 created "1983.".
- 83006689 date "1983".
- 83006689 date "1983.".
- 83006689 dateCopyrighted "1983.".
- 83006689 description "Includes bibliographical references and index.".
- 83006689 extent "x, 556 p. :".
- 83006689 identifier "0387124918 (U.S.)".
- 83006689 isPartOf "Springer series in electrophysics ; v. 11".
- 83006689 issued "1983".
- 83006689 issued "1983.".
- 83006689 language "eng".
- 83006689 publisher "Berlin ; New York : Springer-Verlag,".
- 83006689 subject "621.3815/2 19".
- 83006689 subject "Ion implantation Congresses.".
- 83006689 subject "Semiconductor doping Congresses.".
- 83006689 subject "TK7871.85 .I5864 1983".
- 83006689 title "Ion implantation : equipment and techniques : proceedings of the Fourth International Conference, Berchtesgaden, Fed. Rep. of Germany, September 13-17, 1982 / editors, H. Ryssel and H. Glawischnig.".
- 83006689 type "text".