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- 83008028 contributor B4396887.
- 83008028 contributor B4396888.
- 83008028 created "c1983.".
- 83008028 date "1983".
- 83008028 date "c1983.".
- 83008028 dateCopyrighted "c1983.".
- 83008028 description "Includes bibliographical references and indexes.".
- 83008028 extent "xiii, 298 p. :".
- 83008028 identifier "0444007822 :".
- 83008028 isPartOf "Materials Research Society symposia proceedings ; v. 17".
- 83008028 issued "1983".
- 83008028 issued "c1983.".
- 83008028 language "eng".
- 83008028 publisher "New York : North-Holland,".
- 83008028 subject "621.3815/2 19".
- 83008028 subject "Lasers Industrial applications Congresses.".
- 83008028 subject "Semiconductors Congresses.".
- 83008028 subject "TA1673 .L355 1983".
- 83008028 title "Laser diagnostics and photochemical processing for semiconductor devices : symposium held November 1982 in Boston, Massachusetts, U.S.A. / editors, R.M. Osgood, S.R.J. Brueck, and H.R. Schlossberg.".
- 83008028 type "text".