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- 83022351 contributor B4415345.
- 83022351 created "1984.".
- 83022351 date "1984".
- 83022351 date "1984.".
- 83022351 dateCopyrighted "1984.".
- 83022351 description "Includes bibliographies and index.".
- 83022351 extent "xiv, 527 p. :".
- 83022351 identifier "0122341082 (alk. paper)".
- 83022351 isPartOf "VLSI electronics ; v. 8".
- 83022351 issued "1984".
- 83022351 issued "1984.".
- 83022351 language "eng".
- 83022351 publisher "New York : Academic Press,".
- 83022351 subject "621.381/73 19".
- 83022351 subject "Integrated circuits Very large scale integration.".
- 83022351 subject "Plasma (Ionized gases) Industrial applications.".
- 83022351 subject "TK7874 .V56 vol. 8".
- 83022351 title "Plasma processing for VLSI / edited by Norman G. Einspruch, Dale M. Brown.".
- 83022351 type "text".