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- 83051563%2F%2Fr892 contributor B4427777.
- 83051563%2F%2Fr892 contributor B4427778.
- 83051563%2F%2Fr892 created "1983.".
- 83051563%2F%2Fr892 date "1983".
- 83051563%2F%2Fr892 date "1983.".
- 83051563%2F%2Fr892 dateCopyrighted "1983.".
- 83051563%2F%2Fr892 description "Includes bibliographies and index.".
- 83051563%2F%2Fr892 extent "vi, 140 p. :".
- 83051563%2F%2Fr892 identifier "0892524839 (pbk.)".
- 83051563%2F%2Fr892 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 448".
- 83051563%2F%2Fr892 issued "1983".
- 83051563%2F%2Fr892 issued "1983.".
- 83051563%2F%2Fr892 language "eng".
- 83051563%2F%2Fr892 publisher "Bellingham, Wash., USA : SPIE,".
- 83051563%2F%2Fr892 subject "621.3815/2 19".
- 83051563%2F%2Fr892 subject "TK7836 .X2 1983".
- 83051563%2F%2Fr892 subject "X-ray lithography Congresses.".
- 83051563%2F%2Fr892 subject "X-rays Industrial applications Congresses.".
- 83051563%2F%2Fr892 title "X-ray lithography and applications of soft x-rays to technology : October 19-20, 1983, Upton, New York / Alan D. Wilson, chairman/editor ; cosponsors, National Synchrotron Light Source/Brookhaven National Laboratory, SPIE--the International Society for Optical Engineering.".
- 83051563%2F%2Fr892 type "text".