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- 83061336%2F%2Fr85 contributor B4429183.
- 83061336%2F%2Fr85 contributor B4429184.
- 83061336%2F%2Fr85 created "c1983.".
- 83061336%2F%2Fr85 date "1983".
- 83061336%2F%2Fr85 date "c1983.".
- 83061336%2F%2Fr85 dateCopyrighted "c1983.".
- 83061336%2F%2Fr85 description "Includes bibliographical references and indexes.".
- 83061336%2F%2Fr85 extent "vi, 155 p. :".
- 83061336%2F%2Fr85 identifier "0892524200 (pbk.)".
- 83061336%2F%2Fr85 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 385".
- 83061336%2F%2Fr85 issued "1983".
- 83061336%2F%2Fr85 issued "c1983.".
- 83061336%2F%2Fr85 language "eng".
- 83061336%2F%2Fr85 publisher "Bellingham, Wash. : SPIE--the International Society for Optical Engineering,".
- 83061336%2F%2Fr85 subject "621.381/7 19".
- 83061336%2F%2Fr85 subject "Lasers Industrial applications.".
- 83061336%2F%2Fr85 subject "Microelectronics.".
- 83061336%2F%2Fr85 subject "TK7874 .L3 1983".
- 83061336%2F%2Fr85 title "Laser processing of semiconductor devices : January 18-19, 1983, Los Angeles, California / Charles C. Tang, chairman/editor ; cooperating organization, Materials Research Society.".
- 83061336%2F%2Fr85 type "text".