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- 83105295 contributor B4443758.
- 83105295 created "1982.".
- 83105295 date "1982".
- 83105295 date "1982.".
- 83105295 dateCopyrighted "1982.".
- 83105295 description "Includes bibliographical references.".
- 83105295 extent "134 p. :".
- 83105295 isPartOf "Massovai︠a︡ biblioteka inzhenera Ėlektronika ; 32".
- 83105295 issued "1982".
- 83105295 issued "1982.".
- 83105295 language "rus".
- 83105295 subject "Integrated circuits Testing.".
- 83105295 subject "Optical instruments.".
- 83105295 subject "TK7874 .O68 1982".
- 83105295 title "Opticheskie metody kontroli︠a︡ integralʹnykh mikroskhem : sostoi︠a︡nie i perspektivy sovershenstvovanii︠a︡ / pod redakt︠s︡ieĭ L.G. Dubit︠s︡kogo ; [avtory I︠U︡.S. Vartani︠a︡n ... et al.].".
- 83105295 type "text".