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- 83178226 contributor B4516347.
- 83178226 contributor B4516348.
- 83178226 created "1983.".
- 83178226 date "1983".
- 83178226 date "1983.".
- 83178226 dateCopyrighted "1983.".
- 83178226 description "Bibliography: p. 121-[125].".
- 83178226 extent "124, [3] p. :".
- 83178226 isPartOf "Massovai︠a︡ biblioteka inzhenera--Ėlektronika ; vyp. 36".
- 83178226 issued "1983".
- 83178226 issued "1983.".
- 83178226 language "rus".
- 83178226 publisher "Moskva : Radio i svi︠a︡zʹ,".
- 83178226 subject "Integrated circuits.".
- 83178226 subject "Plasma etching.".
- 83178226 subject "Semiconductors Etching.".
- 83178226 subject "TK7874 .K53 1983".
- 83178226 title "Plazmokhimicheskoe i ionno-khimicheskoe travlenie mikrostruktur / V.I︠U︡. Kireev, B.S. Danilin, V.I. Kuznet︠s︡ov.".
- 83178226 type "text".