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- 83600548 contributor B4590956.
- 83600548 contributor B4590957.
- 83600548 created "1983.".
- 83600548 date "1983".
- 83600548 date "1983.".
- 83600548 dateCopyrighted "1983.".
- 83600548 description "Includes bibliographical references.".
- 83600548 extent "1 v. (various pagings) :".
- 83600548 isPartOf "NBS special publication ; 400-75".
- 83600548 isPartOf "Semiconductor measurement technology".
- 83600548 issued "1983".
- 83600548 issued "1983.".
- 83600548 language "eng".
- 83600548 publisher "Washington, DC : U.S. Dept. of Commerce, National Bureau of Standards : For sale by the Supt. of Docs., U.S. G.P.O.,".
- 83600548 subject "602/.18 s 621.381/7/0285425 19".
- 83600548 subject "Integrated circuits Design and construction Data processing.".
- 83600548 subject "Microelectronics Computer programs.".
- 83600548 subject "QC100 .U57 no. 400-75 TK7874".
- 83600548 title "A FORTRAN program for analysis of data from microelectronic test structures / Richard L. Mattis.".
- 83600548 type "text".