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- 84001145 contributor B4619268.
- 84001145 created "1984.".
- 84001145 date "1984".
- 84001145 date "1984.".
- 84001145 dateCopyrighted "1984.".
- 84001145 description "Bibliography: p. 223-294.".
- 84001145 extent "xi, 299 p. :".
- 84001145 identifier "0444869050".
- 84001145 isPartOf "Materials processing, theory and practices ; v. 4.".
- 84001145 isPartOf "Materials processing--theory and practices ; v. 4".
- 84001145 issued "1984".
- 84001145 issued "1984.".
- 84001145 language "eng".
- 84001145 publisher "Amsterdam ; New York : North-Holland Physics Pub. ; New York, N.Y. : Distributors for the USA and Canada, Elsevier Science Pub. Co.,".
- 84001145 subject "621.381/73".
- 84001145 subject "Plasma etching.".
- 84001145 subject "Semiconductors Etching.".
- 84001145 subject "TK7871.85 .D79 1984".
- 84001145 title "Dry etching for microelectronics / edited by Ronald A. Powell.".
- 84001145 type "text".