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- 84003723 alternative "Ionenimplantation. English".
- 84003723 contributor B4622632.
- 84003723 contributor B4622633.
- 84003723 created "c1986.".
- 84003723 date "1986".
- 84003723 date "c1986.".
- 84003723 dateCopyrighted "c1986.".
- 84003723 description "Bibliography: p. 429-453.".
- 84003723 extent "xvii, 459 p. :".
- 84003723 identifier "047110311X :".
- 84003723 issued "1986".
- 84003723 issued "c1986.".
- 84003723 language "eng".
- 84003723 language "engger".
- 84003723 publisher "Chichester ; New York : Wiley,".
- 84003723 subject "621.3815/2 19".
- 84003723 subject "Ion implantation.".
- 84003723 subject "Semiconductors.".
- 84003723 subject "TK7871.85 .R9713 1986".
- 84003723 title "Ion implantation / Heiner Ryssel and Ingolf Ruge ; translated by Jerome-Allan Buckman and Heiner Ryssel.".
- 84003723 title "Ionenimplantation. English".
- 84003723 type "text".