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- 84005394 contributor B4624779.
- 84005394 created "1984.".
- 84005394 date "1984".
- 84005394 date "1984.".
- 84005394 dateCopyrighted "1984.".
- 84005394 description "Includes bibliographical references and index.".
- 84005394 extent "p. cm.".
- 84005394 identifier "0387133208 (U.S.)".
- 84005394 isPartOf "Topics in current physics ; 37".
- 84005394 issued "1984".
- 84005394 issued "1984.".
- 84005394 language "eng".
- 84005394 publisher "Berlin ; New York : Springer-Verlag,".
- 84005394 subject "530.4/1 19".
- 84005394 subject "QC176.84.S93 T46 1984".
- 84005394 subject "Sputtering (Physics)".
- 84005394 subject "Surface chemistry.".
- 84005394 subject "Thin films Surfaces.".
- 84005394 title "Thin-film and depth-profile analysis / edited by H. Oechsner ; with contributions by H.W. Etzkorn ... [et al.].".
- 84005394 type "text".