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- 84013352 alternative "Microelectronic technology.".
- 84013352 contributor B4635007.
- 84013352 contributor B4635008.
- 84013352 created "c1984.".
- 84013352 date "1984".
- 84013352 date "c1984.".
- 84013352 dateCopyrighted "c1984.".
- 84013352 description "Includes bibliographies and index.".
- 84013352 extent "viii, 367 p. :".
- 84013352 identifier "0306418037".
- 84013352 isPartOf "The IBM research symposia series".
- 84013352 issued "1984".
- 84013352 issued "c1984.".
- 84013352 language "eng".
- 84013352 publisher "New York : Plenum Press,".
- 84013352 subject "621.381/7 19".
- 84013352 subject "Integrated circuits Very large scale integration Design and construction Congresses.".
- 84013352 subject "Ion beam lithography Congresses.".
- 84013352 subject "Photolithography Congresses.".
- 84013352 subject "TK7874 .I5924 1982".
- 84013352 subject "X-ray lithography Congresses.".
- 84013352 title "Methods and materials in microelectronic technology / edited by Joachim Bargon.".
- 84013352 type "text".