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- 84014806 contributor B4636852.
- 84014806 contributor B4636853.
- 84014806 created "c1984.".
- 84014806 date "1984".
- 84014806 date "c1984.".
- 84014806 dateCopyrighted "c1984.".
- 84014806 description "Includes bibliographies.".
- 84014806 extent "ix, 268 p. :".
- 84014806 identifier "0815510039 :".
- 84014806 issued "1984".
- 84014806 issued "c1984.".
- 84014806 language "eng".
- 84014806 publisher "Park Ridge, N.J. : Noyes Publications,".
- 84014806 subject "621.042 19".
- 84014806 subject "Plasma engineering.".
- 84014806 subject "TA2020 .P53 1984".
- 84014806 title "Plasma processing of materials / edited by H.J. Oskam.".
- 84014806 type "text".