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- 84018476 contributor B4641645.
- 84018476 contributor B4641646.
- 84018476 contributor B4641647.
- 84018476 created "c1984.".
- 84018476 date "1984".
- 84018476 date "c1984.".
- 84018476 dateCopyrighted "c1984.".
- 84018476 description "Includes bibliographies and index.".
- 84018476 extent "671 p. :".
- 84018476 identifier "0803104030".
- 84018476 isPartOf "ASTM special technical publication ; 850.".
- 84018476 isPartOf "ASTM special technical publications ; 850".
- 84018476 issued "1984".
- 84018476 issued "c1984.".
- 84018476 language "eng".
- 84018476 publisher "Philadelphia, PA : ASTM,".
- 84018476 subject "621.3815/2 19".
- 84018476 subject "Semiconductor industry Congresses.".
- 84018476 subject "TK7871.85 .S467 1984".
- 84018476 title "Semiconductor processing : a symposium / sponsored by ASTM Committee F-1 on Electronics ... [et al.], San Jose, CA, 7-10 Feb., 1984 ; D.C. Gupta, editor.".
- 84018476 type "text".