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- 84045412 contributor B4657674.
- 84045412 created "1984.".
- 84045412 date "1984".
- 84045412 date "1984.".
- 84045412 dateCopyrighted "1984.".
- 84045412 description "Includes bibliographies and index.".
- 84045412 extent "xi, 635 p. :".
- 84045412 identifier "0127806202 (alk. paper)".
- 84045412 issued "1984".
- 84045412 issued "1984.".
- 84045412 language "eng".
- 84045412 publisher "Orlando : Academic Press,".
- 84045412 subject "539/.6 19".
- 84045412 subject "Ion implantation.".
- 84045412 subject "QC702.7.I55 I59 1984".
- 84045412 title "Ion implantation : science and technology / edited by J.F. Ziegler.".
- 84045412 type "text".