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- 84050822%2F%2Fr852 alternative "Optical microlithography 3.".
- 84050822%2F%2Fr852 alternative "Optical microlithography three.".
- 84050822%2F%2Fr852 contributor B4660486.
- 84050822%2F%2Fr852 contributor B4660487.
- 84050822%2F%2Fr852 created "c1984.".
- 84050822%2F%2Fr852 date "1984".
- 84050822%2F%2Fr852 date "c1984.".
- 84050822%2F%2Fr852 dateCopyrighted "c1984.".
- 84050822%2F%2Fr852 description "Includes bibliographies and index.".
- 84050822%2F%2Fr852 extent "vi, 269 p. :".
- 84050822%2F%2Fr852 identifier "0892525053 (pbk.)".
- 84050822%2F%2Fr852 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 470".
- 84050822%2F%2Fr852 issued "1984".
- 84050822%2F%2Fr852 issued "c1984.".
- 84050822%2F%2Fr852 language "eng".
- 84050822%2F%2Fr852 publisher "Bellingham, Wash., USA : SPIE--the International Society for Optical Engineering,".
- 84050822%2F%2Fr852 subject "621.381/74 19".
- 84050822%2F%2Fr852 subject "Integrated circuits Very large scale integration Congresses.".
- 84050822%2F%2Fr852 subject "Microlithography Congresses.".
- 84050822%2F%2Fr852 subject "TR940 .O69 1984".
- 84050822%2F%2Fr852 title "Optical microlithography III : technology for the next decade : March 14-15, 1984, Santa Clara, California / Harry L. Stover, chairman/editor.".
- 84050822%2F%2Fr852 type "text".