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- 84051334 alternative "Integrated circuit metrology 2.".
- 84051334 alternative "Integrated circuit metrology two.".
- 84051334 contributor B4660917.
- 84051334 contributor B4660918.
- 84051334 created "c1984.".
- 84051334 date "1984".
- 84051334 date "c1984.".
- 84051334 dateCopyrighted "c1984.".
- 84051334 description "Includes bibliographical references and index.".
- 84051334 extent "vi, 172 p. :".
- 84051334 identifier "0892525150 (pbk.)".
- 84051334 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 480".
- 84051334 issued "1984".
- 84051334 issued "c1984.".
- 84051334 language "eng".
- 84051334 publisher "Bellingham, Wash., USA : SPIE--the International Society for Optical Engineering,".
- 84051334 subject "621.381/73 19".
- 84051334 subject "Integrated circuits Congresses.".
- 84051334 subject "Measurement Congresses.".
- 84051334 subject "TK7874 .I5424 1984".
- 84051334 title "Integrated circuit metrology II : May 3-4, 1984, Arlington, Virginia / Diana Nyyssonen, chairman/editor ; cooperating organization, National Bureau of Standards.".
- 84051334 type "text".