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- 85003255 alternative "Handōtai purazuma purosesu gijutsu. English".
- 85003255 contributor B4867394.
- 85003255 created "c1985.".
- 85003255 date "1985".
- 85003255 date "c1985.".
- 85003255 dateCopyrighted "c1985.".
- 85003255 description "Bibliography: p. 369-389.".
- 85003255 extent "xiv, 394 p. :".
- 85003255 identifier "0471869600".
- 85003255 issued "1985".
- 85003255 issued "c1985.".
- 85003255 language "eng".
- 85003255 language "engjpn".
- 85003255 publisher "New York : Wiley,".
- 85003255 subject "621.381/73 19".
- 85003255 subject "Integrated circuits Very large scale integration Design and construction.".
- 85003255 subject "Plasma etching.".
- 85003255 subject "Semiconductors Etching.".
- 85003255 subject "TK7871.85 .H34713 1985".
- 85003255 subject "Vapor-plating.".
- 85003255 title "Applications of plasma processes to VLSI technology / edited by Takuo Sugano ; translated by Hyo-gun Kim.".
- 85003255 title "Handōtai purazuma purosesu gijutsu. English".
- 85003255 type "text".