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- 85004392 contributor B4868819.
- 85004392 created "1985.".
- 85004392 date "1985".
- 85004392 date "1985.".
- 85004392 dateCopyrighted "1985.".
- 85004392 description "Bibliography: p. 303-311.".
- 85004392 extent "x, 316 p. :".
- 85004392 identifier "0444424199".
- 85004392 isPartOf "Plasma technology ; 1".
- 85004392 issued "1985".
- 85004392 issued "1985.".
- 85004392 language "eng".
- 85004392 publisher "Amsterdam ; New York : Elsevier,".
- 85004392 subject "621.3815/2 19".
- 85004392 subject "Plasma etching.".
- 85004392 subject "Semiconductors Etching.".
- 85004392 subject "TK7871.85 .M587 1985".
- 85004392 title "Plasma etching in semiconductor fabrication / Russ A. Morgan.".
- 85004392 type "text".