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- 85018196 contributor B4886451.
- 85018196 created "c1986.".
- 85018196 date "1986".
- 85018196 date "c1986.".
- 85018196 dateCopyrighted "c1986.".
- 85018196 description "Includes bibliographies and index.".
- 85018196 extent "xix, 378 p. :".
- 85018196 identifier "0070193045 :".
- 85018196 issued "1986".
- 85018196 issued "c1986.".
- 85018196 language "eng".
- 85018196 publisher "New York : McGraw-Hill,".
- 85018196 subject "621.381/73 19".
- 85018196 subject "Integrated circuits Very large scale integration Design and construction.".
- 85018196 subject "Microlithography.".
- 85018196 subject "Photoresists.".
- 85018196 subject "TK7874 .E495 1986".
- 85018196 title "Microlithography : process technology for IC fabrication / David J. Elliott.".
- 85018196 type "text".