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- 85030648 contributor B4901684.
- 85030648 contributor B4901685.
- 85030648 created "1986.".
- 85030648 date "1986".
- 85030648 date "1986.".
- 85030648 dateCopyrighted "1986.".
- 85030648 description "Includes bibliographies and indexes.".
- 85030648 extent "x, 443 p. :".
- 85030648 identifier "0841209340".
- 85030648 identifier 85030648-d.html.
- 85030648 identifier 85030648-t.html.
- 85030648 isPartOf "ACS symposium series, 0097-6156 ; 295".
- 85030648 issued "1986".
- 85030648 issued "1986.".
- 85030648 language "eng".
- 85030648 publisher "Washington, DC : American Chemical Society,".
- 85030648 subject "621.381/7 19".
- 85030648 subject "Microelectronics Materials Congresses.".
- 85030648 subject "TK7874 .M486 1986".
- 85030648 title "Microelectronics processing : inorganic materials characterization / Lawrence A. Casper, editor ; developed from a symposium sponsored by the Division of Industrial and Engineering Chemistry of the American Chemical Society.".
- 85030648 type "text".