Matches in Library of Congress for { <http://lccn.loc.gov/85061232%2F%2Fr97> ?p ?o. }
Showing items 1 to 22 of
22
with 100 items per page.
- 85061232%2F%2Fr97 alternative "Optical microlithography 4.".
- 85061232%2F%2Fr97 alternative "Optical microlithography four.".
- 85061232%2F%2Fr97 contributor B4910492.
- 85061232%2F%2Fr97 contributor B4910493.
- 85061232%2F%2Fr97 created "c1985.".
- 85061232%2F%2Fr97 date "1985".
- 85061232%2F%2Fr97 date "c1985.".
- 85061232%2F%2Fr97 dateCopyrighted "c1985.".
- 85061232%2F%2Fr97 description "Includes bibliographies.".
- 85061232%2F%2Fr97 extent "vi, 260 p. :".
- 85061232%2F%2Fr97 identifier "0892525738 (spine : pbk.)".
- 85061232%2F%2Fr97 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 538".
- 85061232%2F%2Fr97 issued "1985".
- 85061232%2F%2Fr97 issued "c1985.".
- 85061232%2F%2Fr97 language "eng".
- 85061232%2F%2Fr97 publisher "Bellingham, Wash., USA : SPIE--the International Society for Optical Engineering,".
- 85061232%2F%2Fr97 subject "621.381/74 19".
- 85061232%2F%2Fr97 subject "Integrated circuits Very large scale integration Congresses.".
- 85061232%2F%2Fr97 subject "Microlithography Congresses.".
- 85061232%2F%2Fr97 subject "TR940 .O695 1985".
- 85061232%2F%2Fr97 title "Optical microlithography IV : March 13-14, 1985, Santa Clara, California / Harry L. Stover, chairman/editor ; cooperating organization, the International Society for Hybrid Microelectronics.".
- 85061232%2F%2Fr97 type "text".