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- 85062883 contributor B4912013.
- 85062883 contributor B4912014.
- 85062883 created "1985.".
- 85062883 date "1985".
- 85062883 date "1985.".
- 85062883 dateCopyrighted "1985.".
- 85062883 description "Includes bibliographies.".
- 85062883 extent "vi, 223 p. :".
- 85062883 identifier "0892526009 (pbk.)".
- 85062883 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 565".
- 85062883 issued "1985".
- 85062883 issued "1985.".
- 85062883 language "eng".
- 85062883 publisher "Bellingham, Wash., USA : SPIE--International Society for Optical Engineering,".
- 85062883 subject "621.381/73 19".
- 85062883 subject "Integrated circuits Measurement Congresses.".
- 85062883 subject "Integrated circuits Testing Congresses.".
- 85062883 subject "TK7874 .M488 1985".
- 85062883 title "Micron and submicron integrated circuit metrology : August 22-23, 1985, San Diego, California / Kevin M. Monahan, chairman/editor ; cooperating organizations, Optical Sciences Center/University of Arizona, Institute of Optics/University of Rochester.".
- 85062883 type "text".