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- 85139872 contributor B4963100.
- 85139872 contributor B4963101.
- 85139872 created "1984.".
- 85139872 date "1984".
- 85139872 date "1984.".
- 85139872 dateCopyrighted "1984.".
- 85139872 description "Bibliography: p. 338-[347]".
- 85139872 extent "349 p. :".
- 85139872 issued "1984".
- 85139872 issued "1984.".
- 85139872 language "rus".
- 85139872 subject "Integrated circuits Design and construction.".
- 85139872 subject "Lithography.".
- 85139872 subject "TK7874 .V33 1984".
- 85139872 title "Fizicheskie osnovy submikronnoĭ litografii v mikro-ėlektronike / K.A. Valiev, A.V. Rakov.".
- 85139872 type "text".