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- 85178046 contributor B5004582.
- 85178046 created "c1985.".
- 85178046 date "1985".
- 85178046 date "c1985.".
- 85178046 dateCopyrighted "c1985.".
- 85178046 description "Includes bibliographies.".
- 85178046 extent "181 p. :".
- 85178046 identifier "3180905646".
- 85178046 isPartOf "VDI Berichte, 0083-5560 ; 564".
- 85178046 isPartOf "VDI-Berichte ; 564.".
- 85178046 issued "1985".
- 85178046 issued "c1985.".
- 85178046 language "ger".
- 85178046 language "gereng".
- 85178046 publisher "Düsseldorf : VDI Verlag,".
- 85178046 subject "Machinery industry Electronic equipment.".
- 85178046 subject "Microelectronics.".
- 85178046 subject "TA3 .V15 Nr. 564 TJ153".
- 85178046 title "Mikroelektronik im Maschinenbau : Tagung, München, 13. und 14. November 1984 / [Herausgeber], VDI-Gesellschaft Konstruktion und Entwicklung.".
- 85178046 type "text".