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- 85203846 contributor B5033104.
- 85203846 created "c1985.".
- 85203846 date "1985".
- 85203846 date "c1985.".
- 85203846 dateCopyrighted "c1985.".
- 85203846 description "Includes bibliographies.".
- 85203846 extent "141 p. :".
- 85203846 identifier "3180905557".
- 85203846 isPartOf "VDI-Berichte, 0083-5560 ; 555".
- 85203846 issued "1985".
- 85203846 issued "c1985.".
- 85203846 language "ger".
- 85203846 publisher "Düsseldorf : VDI,".
- 85203846 subject "620 s 621.381/73 19".
- 85203846 subject "Integrated circuits Masks Congresses.".
- 85203846 subject "TA3 .V15 nr. 555 TK7872.M3".
- 85203846 title "Maskentechnik für Mikroelektronik-Bausteine : Tagung München, 15. November 1984 / VDI/VDE-Gesellschaft Feinwerktechnik.".
- 85203846 type "text".