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- 86005265 contributor B5138749.
- 86005265 created "c1986.".
- 86005265 date "1986".
- 86005265 date "c1986.".
- 86005265 dateCopyrighted "c1986.".
- 86005265 description "Includes bibliographies and index.".
- 86005265 extent "xiv, 484 p. :".
- 86005265 identifier "0931837170 :".
- 86005265 isPartOf "Materials Research Society symposia proceedings, 0272-9172 ; v. 52".
- 86005265 issued "1986".
- 86005265 issued "c1986.".
- 86005265 language "eng".
- 86005265 publisher "Pittsburgh, Pa. : Materials, Research Society,".
- 86005265 subject "621.3815/2 19".
- 86005265 subject "Semiconductor doping Congresses.".
- 86005265 subject "Semiconductors Heat treatment Congresses.".
- 86005265 subject "TK7871.85 .R35 1986".
- 86005265 title "Rapid thermal processing : symposium held December 2-4, 1985, Boston, Massachusetts, USA / editors, Thomas O. Sedgwick, Thomas E. Seidel, Bor-Yeu Tsaur.".
- 86005265 type "text".