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- 86017731 contributor B5154238.
- 86017731 contributor B5154239.
- 86017731 created "c1986.".
- 86017731 date "1986".
- 86017731 date "c1986.".
- 86017731 dateCopyrighted "c1986.".
- 86017731 description "Includes bibliographies and index.".
- 86017731 extent "xi, 469 p. :".
- 86017731 identifier "0387168982 (U.S.)".
- 86017731 isPartOf "Springer proceedings in physics ; v. 13".
- 86017731 issued "1986".
- 86017731 issued "c1986.".
- 86017731 language "eng".
- 86017731 publisher "Berlin ; New York : Springer-Verlag,".
- 86017731 subject "621.3815/2 19".
- 86017731 subject "Integrated circuits Very large scale integration Design and construction Congresses.".
- 86017731 subject "Semiconductors Congresses.".
- 86017731 subject "Semiconductors Design and construction Congresses.".
- 86017731 subject "TK7871.85 .P47 1986".
- 86017731 title "The Physics and fabrication of microstructures and microdevices : proceedings of the winter school, Les Houches, France, March 25-April 5, 1986 / editors, M.J. Kelly and C. Weisbuch.".
- 86017731 type "text".