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- 86028744 contributor B5168131.
- 86028744 created "1987.".
- 86028744 date "1987".
- 86028744 date "1987.".
- 86028744 dateCopyrighted "1987.".
- 86028744 description "Includes bibliographies and index.".
- 86028744 extent "x, 480 p. :".
- 86028744 identifier "0122341155 (alk. paper)".
- 86028744 isPartOf "VLSI electronics ; v. 15".
- 86028744 issued "1987".
- 86028744 issued "1987.".
- 86028744 language "eng".
- 86028744 publisher "Orlando : Academic Press,".
- 86028744 subject "621.381/73 s 621.381/73 19".
- 86028744 subject "Integrated circuits Very large scale integration Design and construction.".
- 86028744 subject "Metallic films.".
- 86028744 subject "Metallizing.".
- 86028744 subject "TK7874 .V56 vol. 15".
- 86028744 title "VLSI metallization / edited by Norman G. Einspruch, Simon S. Cohen, Gennady Sh. Gildenblat.".
- 86028744 type "text".