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- 86032156 contributor B5172407.
- 86032156 created "1987.".
- 86032156 date "1987".
- 86032156 date "1987.".
- 86032156 dateCopyrighted "1987.".
- 86032156 description "Includes bibliographies and index.".
- 86032156 extent "xi, 361 p. :".
- 86032156 identifier "0122341163 (alk. paper)".
- 86032156 isPartOf "VLSI electronics ; v. 16".
- 86032156 issued "1987".
- 86032156 issued "1987.".
- 86032156 language "eng".
- 86032156 publisher "Orlando : Academic Press,".
- 86032156 subject "621.381/73 s 621.381/73 19".
- 86032156 subject "Integrated circuits Very large scale integration.".
- 86032156 subject "Lithography.".
- 86032156 subject "Printed circuits.".
- 86032156 subject "TK7874 .V56 vol. 16".
- 86032156 title "Lithography for VLSI / edited by Norman G. Einspruch, R.K. Watts.".
- 86032156 type "text".