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- 86061033 alternative "Optical microlithography 5.".
- 86061033 alternative "Optical microlithography five.".
- 86061033 contributor B5180131.
- 86061033 contributor B5180132.
- 86061033 created "c1986.".
- 86061033 date "1986".
- 86061033 date "c1986.".
- 86061033 dateCopyrighted "c1986.".
- 86061033 description "Includes bibliographies and index.".
- 86061033 extent "vi, 309 p. :".
- 86061033 identifier "0892526688 (pbk.)".
- 86061033 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 633".
- 86061033 issued "1986".
- 86061033 issued "c1986.".
- 86061033 language "eng".
- 86061033 publisher "Bellingham, Wash., USA : SPIE--the International Society for Optical Engineering,".
- 86061033 subject "621.381/74 19".
- 86061033 subject "Integrated circuits Very large scale integration Congresses.".
- 86061033 subject "Microlithography Congresses.".
- 86061033 subject "TR940 .O696 1986".
- 86061033 title "Optical microlithography V : 13-14 March 1986, Santa Clara, California / Harry L. Stover, chairman/editor.".
- 86061033 type "text".