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- 86070108 alternative "Frontiers in electronic materials and processing.".
- 86070108 contributor B5182920.
- 86070108 contributor B5182921.
- 86070108 created "1986.".
- 86070108 date "1986".
- 86070108 date "1986.".
- 86070108 dateCopyrighted "1986.".
- 86070108 description "Includes bibliographies and index.".
- 86070108 extent "338 p. :".
- 86070108 identifier "0883183374".
- 86070108 isPartOf "AIP conference proceedings ; no. 138.".
- 86070108 isPartOf "American Institute of Physics conference proceedings ; no. 138".
- 86070108 isPartOf "American Vacuum Society series ; 1".
- 86070108 issued "1986".
- 86070108 issued "1986.".
- 86070108 language "eng".
- 86070108 publisher "New York : American Institute of Physics,".
- 86070108 subject "621.3815/2 19".
- 86070108 subject "Microelectronics Congresses.".
- 86070108 subject "Semiconductors Congresses.".
- 86070108 subject "TK7871.85 .F76 1986".
- 86070108 title "Frontiers in electronic materials & processing : Houston, Texas, November 1985 / editor, L.J. Brillson.".
- 86070108 type "text".