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- 86081923 contributor B5187522.
- 86081923 contributor B5187523.
- 86081923 created "c1986-c1995.".
- 86081923 date "1986".
- 86081923 date "c1986-c1995.".
- 86081923 dateCopyrighted "c1986-c1995.".
- 86081923 description "Includes bibliographies and indexes.".
- 86081923 description "v. 1. Process technology -- v. 2. Process integration -- v. 3. The submicron MOSFET.".
- 86081923 extent "3 v. :".
- 86081923 identifier "0961672137 (cover : v. 1)".
- 86081923 identifier "0961672145 (v. 2)".
- 86081923 issued "1986".
- 86081923 issued "c1986-c1995.".
- 86081923 language "eng".
- 86081923 publisher "Sunset Beach, Calif. : Lattice Press,".
- 86081923 subject "621.381/73 19".
- 86081923 subject "Integrated circuits Very large scale integration.".
- 86081923 subject "Semiconductors Etching.".
- 86081923 subject "Silicon.".
- 86081923 subject "TK7874 .W635 1986".
- 86081923 tableOfContents "v. 1. Process technology -- v. 2. Process integration -- v. 3. The submicron MOSFET.".
- 86081923 title "Silicon processing for the VLSI era / Stanley Wolf, Richard N. Tauber.".
- 86081923 type "text".