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- 86082171 contributor B5187738.
- 86082171 contributor B5187739.
- 86082171 contributor B5187740.
- 86082171 created "c1986.".
- 86082171 date "1986".
- 86082171 date "c1986.".
- 86082171 dateCopyrighted "c1986.".
- 86082171 description "Includes bibliographies and indexes.".
- 86082171 extent "ix, 609 p. :".
- 86082171 isPartOf "Proceedings (Electrochemical Society) ; v. 86-5.".
- 86082171 isPartOf "Proceedings / Electrochemical Society ; v. 86-5".
- 86082171 issued "1986".
- 86082171 issued "c1986.".
- 86082171 language "eng".
- 86082171 publisher "Pennington, NJ (10 S. Main St., Pennington 085334-2896) : Electrochemical Society,".
- 86082171 subject "621.395 19".
- 86082171 subject "Integrated circuits Very large scale integration Congresses.".
- 86082171 subject "Low temperatures Congresses.".
- 86082171 subject "TK7874 .S948 1985".
- 86082171 title "Proceedings of the Symposium on Reduced Temperature Processing for VLSI / edited by Rafael Reif, G.R. Srinivasan ; assistant editors J. Andrews ... [et al.] ; Electronics and Dielectrics and Insulation Divisions.".
- 86082171 type "text".