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- 86189134 contributor B5287119.
- 86189134 created "1985.".
- 86189134 date "1985".
- 86189134 date "1985.".
- 86189134 dateCopyrighted "1985.".
- 86189134 description "Bibliography: p. 424-425.".
- 86189134 extent "vi, 425 p. :".
- 86189134 issued "1985".
- 86189134 issued "1985.".
- 86189134 language "chi".
- 86189134 publisher "[Peking] : Yu hang chu ban she : Xin hua shu dian Beijing fa xing suo fa xing,".
- 86189134 subject "539.7/2112 19".
- 86189134 subject "Electron beams.".
- 86189134 subject "Ion beam lithography.".
- 86189134 subject "Ion bombardment.".
- 86189134 subject "Lithography, Electron.".
- 86189134 subject "QC793.5.E622 W82 1985".
- 86189134 title "880-02 Dian zi shu sao miao pu guang ji shu / Wu Kehua zhu.".
- 86189134 type "text".