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- 87007749%2F%2Fr97 contributor B5386059.
- 87007749%2F%2Fr97 contributor B5386060.
- 87007749%2F%2Fr97 contributor B5386061.
- 87007749%2F%2Fr97 created "c1987.".
- 87007749%2F%2Fr97 date "1987".
- 87007749%2F%2Fr97 date "c1987.".
- 87007749%2F%2Fr97 dateCopyrighted "c1987.".
- 87007749%2F%2Fr97 description "Includes bibliographies and indexes.".
- 87007749%2F%2Fr97 extent "xvii, 373 p. :".
- 87007749%2F%2Fr97 identifier "0931837421".
- 87007749%2F%2Fr97 isPartOf "Materials Research Society symposia proceedings, 0272-9172 ; v. 76".
- 87007749%2F%2Fr97 issued "1987".
- 87007749%2F%2Fr97 issued "c1987.".
- 87007749%2F%2Fr97 language "eng".
- 87007749%2F%2Fr97 publisher "Pittsburgh, Pa. : Materials Research Society,".
- 87007749%2F%2Fr97 subject "621.381/73 19".
- 87007749%2F%2Fr97 subject "Integrated circuits Very large scale integration Design and construction Congresses.".
- 87007749%2F%2Fr97 subject "Microfabrication Congresses.".
- 87007749%2F%2Fr97 subject "TK7874 .S33 1987".
- 87007749%2F%2Fr97 title "Science and technology of microfabrication : symposium held December 4-5, 1986, Boston, Massachusetts, U.S.A. / editors, R.E. Howard ... [et al.].".
- 87007749%2F%2Fr97 type "text".