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- 87008083 contributor B5386468.
- 87008083 created "c1987.".
- 87008083 date "1987".
- 87008083 date "c1987.".
- 87008083 dateCopyrighted "c1987.".
- 87008083 description "Bibliography: p. 329-330.".
- 87008083 extent "xi, 340 p. :".
- 87008083 identifier "0805368507 (pbk.)".
- 87008083 issued "1987".
- 87008083 issued "c1987.".
- 87008083 language "eng".
- 87008083 publisher "Menlo Park, Calif. : Benjamin/Cummings,".
- 87008083 subject "621.381/73 19".
- 87008083 subject "Integrated circuits Very large scale integration Design and construction.".
- 87008083 subject "TK7874 .M254 1987".
- 87008083 title "Atlas of IC technologies : an introduction to VLSI processes / W. Maly.".
- 87008083 type "text".