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- 87011277 contributor B5390508.
- 87011277 created "c1987.".
- 87011277 date "1987".
- 87011277 date "c1987.".
- 87011277 dateCopyrighted "c1987.".
- 87011277 description "Includes bibliographies and index.".
- 87011277 extent "xi, 215 p. :".
- 87011277 identifier "0815511361 :".
- 87011277 identifier 87011277.html.
- 87011277 isPartOf "Materials science and process technology series".
- 87011277 issued "1987".
- 87011277 issued "c1987.".
- 87011277 language "eng".
- 87011277 publisher "Park Ridge, N.J., U.S.A. : Noyes Publications,".
- 87011277 subject "621.381/7 19".
- 87011277 subject "Integrated circuits Design and construction.".
- 87011277 subject "TS695 .S54 1987".
- 87011277 subject "Vapor-plating.".
- 87011277 title "Chemical vapor deposition for microelectronics : principles, technology, and applications / by Arthur Sherman.".
- 87011277 type "text".