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- 87029077 contributor B5412593.
- 87029077 created "c1988.".
- 87029077 date "1988".
- 87029077 date "c1988.".
- 87029077 dateCopyrighted "c1988.".
- 87029077 description "Includes bibliographies and index.".
- 87029077 extent "xx, 931 p. :".
- 87029077 identifier "0306421852".
- 87029077 isPartOf "Microdevices".
- 87029077 issued "1988".
- 87029077 issued "c1988.".
- 87029077 language "eng".
- 87029077 publisher "New York : Plenum Press,".
- 87029077 subject "621.3815/2 19".
- 87029077 subject "Microlithography.".
- 87029077 subject "Photoresists.".
- 87029077 subject "Semiconductors.".
- 87029077 subject "TK7871.85 .M583 1988".
- 87029077 title "Semiconductor lithography : principles, practices, and materials / Wayne M. Moreau.".
- 87029077 type "text".