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- 87031533 contributor B5415597.
- 87031533 created "c1988.".
- 87031533 date "1988".
- 87031533 date "c1988.".
- 87031533 dateCopyrighted "c1988.".
- 87031533 description "Includes bibliographies and index.".
- 87031533 extent "xxi, 488 p. :".
- 87031533 identifier "0815511515 :".
- 87031533 identifier 87031533.html.
- 87031533 isPartOf "Materials science and process technology series".
- 87031533 issued "1988".
- 87031533 issued "c1988.".
- 87031533 language "eng".
- 87031533 publisher "Park Ridge, N.J., U.S.A. : Noyes Publications,".
- 87031533 subject "621.381/73 19".
- 87031533 subject "Contamination (Technology)".
- 87031533 subject "Integrated circuits Design and construction.".
- 87031533 subject "TK7836 .H34 1988".
- 87031533 title "Handbook of contamination control in microelectronics : principles, applications, and technology / edited by Donald L. Tolliver.".
- 87031533 type "text".