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- 87035864 contributor B5420669.
- 87035864 created "1989.".
- 87035864 date "1989".
- 87035864 date "1989.".
- 87035864 dateCopyrighted "1989.".
- 87035864 description "Includes bibliographies and index.".
- 87035864 extent "172 p. :".
- 87035864 identifier "0521322545".
- 87035864 isPartOf "Cambridge studies in modern optics ; 7".
- 87035864 issued "1989".
- 87035864 issued "1989.".
- 87035864 language "eng".
- 87035864 publisher "Cambridge [England] ; New York : Cambridge University Press,".
- 87035864 subject "621.381/73 19".
- 87035864 subject "Integrated circuits Design and construction.".
- 87035864 subject "Lasers Industrial applications.".
- 87035864 subject "TK7874 .L298 1989".
- 87035864 title "Laser chemical processing for microelectronics / edited by K.G. Ibbs, R.M. Osgood.".
- 87035864 type "text".