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- 87037419 contributor B5422058.
- 87037419 created "c1989.".
- 87037419 date "1989".
- 87037419 date "c1989.".
- 87037419 dateCopyrighted "c1989.".
- 87037419 description "Includes bibliographical references and index.".
- 87037419 extent "xii, 476 p. :".
- 87037419 identifier "0124693709 (alk. paper)".
- 87037419 identifier 87037419.html.
- 87037419 identifier 87037419.html.
- 87037419 isPartOf "Plasma -- materials interactions".
- 87037419 issued "1989".
- 87037419 issued "c1989.".
- 87037419 language "eng".
- 87037419 publisher "Boston : Academic Press,".
- 87037419 subject "621.044 19".
- 87037419 subject "Plasma etching.".
- 87037419 subject "TA2020 .P5 1989".
- 87037419 title "Plasma etching : an introduction / edited by Dennis M. Manos, Daniel L. Flamm.".
- 87037419 type "text".