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- 87060740%2F%2Fr87 alternative "Optical microlithography 6.".
- 87060740%2F%2Fr87 alternative "Optical microlithography six.".
- 87060740%2F%2Fr87 contributor B5428250.
- 87060740%2F%2Fr87 contributor B5428251.
- 87060740%2F%2Fr87 created "c1987.".
- 87060740%2F%2Fr87 date "1987".
- 87060740%2F%2Fr87 date "c1987.".
- 87060740%2F%2Fr87 dateCopyrighted "c1987.".
- 87060740%2F%2Fr87 description "Includes bibliographies and index.".
- 87060740%2F%2Fr87 extent "vi, 292 p. :".
- 87060740%2F%2Fr87 identifier "0892528079 (pbk.)".
- 87060740%2F%2Fr87 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 772".
- 87060740%2F%2Fr87 issued "1987".
- 87060740%2F%2Fr87 issued "c1987.".
- 87060740%2F%2Fr87 language "eng".
- 87060740%2F%2Fr87 publisher "Bellingham, Wash., USA : SPIE,".
- 87060740%2F%2Fr87 subject "621.381/74 19".
- 87060740%2F%2Fr87 subject "Integrated circuits Very large scale integration Congresses.".
- 87060740%2F%2Fr87 subject "Microlithography Congresses.".
- 87060740%2F%2Fr87 subject "TR940 .O697 1987".
- 87060740%2F%2Fr87 title "Optical microlithography VI : 4-5 March 1987, Santa Clara, California / Harry L. Stover, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering.".
- 87060740%2F%2Fr87 type "text".