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- 87060741 contributor B5428252.
- 87060741 contributor B5428253.
- 87060741 created "c1987.".
- 87060741 date "1987".
- 87060741 date "c1987.".
- 87060741 dateCopyrighted "c1987.".
- 87060741 description "Includes bibliographies and index.".
- 87060741 extent "vi, 265 p. :".
- 87060741 identifier "0892528087 (pbk.)".
- 87060741 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 773".
- 87060741 issued "1987".
- 87060741 issued "c1987.".
- 87060741 language "eng".
- 87060741 publisher "Bellingham, Wash., USA : The Society,".
- 87060741 subject "621.3815/2 19".
- 87060741 subject "Ion beam lithography Congresses.".
- 87060741 subject "Lithography, Electron beam Congresses.".
- 87060741 subject "TK7874 .E4817 1987".
- 87060741 subject "X-ray lithography Congresses.".
- 87060741 title "Electron-beam, x-ray, and ion-beam lithographies VI : [proceedings] 5-6 March 1987, Santa Clara, California / Phillip D. Blais, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering.".
- 87060741 type "text".