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- 87061553%2F%2Fr97 contributor B5428966.
- 87061553%2F%2Fr97 contributor B5428967.
- 87061553%2F%2Fr97 contributor B5428968.
- 87061553%2F%2Fr97 created "c1987.".
- 87061553%2F%2Fr97 date "1987".
- 87061553%2F%2Fr97 date "c1987.".
- 87061553%2F%2Fr97 dateCopyrighted "c1987.".
- 87061553%2F%2Fr97 description "Includes bibliographical references and index.".
- 87061553%2F%2Fr97 extent "viii, 159 p. :".
- 87061553%2F%2Fr97 identifier "0892528389 (pbk.)".
- 87061553%2F%2Fr97 isPartOf "Proceedings / SPIE ; v. 803".
- 87061553%2F%2Fr97 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 803.".
- 87061553%2F%2Fr97 issued "1987".
- 87061553%2F%2Fr97 issued "c1987.".
- 87061553%2F%2Fr97 language "eng".
- 87061553%2F%2Fr97 publisher "Bellingham, Wash., USA : SPIE,".
- 87061553%2F%2Fr97 subject "671.3/5 19".
- 87061553%2F%2Fr97 subject "Micromachining Congresses.".
- 87061553%2F%2Fr97 subject "Optical instruments Design and construction Congresses.".
- 87061553%2F%2Fr97 subject "TJ1180 .M48 1987".
- 87061553%2F%2Fr97 title "Micromachining of elements with optical and other submicrometer dimensional and surface specifications : 2-3 April, 1987, The Hague, The Netherlands / M. Weck, chair/editor ; organized by ANRT--Association nationale de la recherche technique, SPIE--the International Society for Optical Engineering ; cooperating sponsors, Comité belge d'optique ... [et al.].".
- 87061553%2F%2Fr97 type "text".